ATO target material
Preparation of nano ATO powder material, which can be used for the preparation of conductive glass and heat insulating glass by magnetron sputtering.
Technical index:
Item |
index |
Appearance |
Blue black |
Composition ratio |
SnO2: Sb2O3=90:10 |
Purity(%) |
SnO2+Sb2O3≥99.99 |
Resistivity |
≤8*10-2Ω·cm |
Relative density |
≥99 |
Note: the target shape can be customized according to customer’s requirements.